A very sturdy tripod and macro focus rail are key. Also important to have a remote shutter release so you don't shake the camera when you press the button to take a picture.
As you can see the flash is off to the side, and I have a flashlight to illuminate the subject so that you can see the subject to focus on it. At such high magnifications the viewfinder is almost black without a flashlight on the subject.
For the egg pictures, I just lean the tile against the side of the aquarium.
For the larvae, I have built several mini aquariums of different sizes with microscope slides and silicone glue. When shooting from above, you need to have a glass lid that is in contact with the water, otherwise the water surface is never 100% flat and the uneven surface causes distortions.
Today's photo makes him look smaller. I had to zoom out again, but again I proportionally increased the size of the image so it "should" be the same scale. But it obviously is not. Apparently the magnification marks on the lens are not accurate. I'm going to need to photograph a ruler at the various settings so that I can figure out how to scale the images correctly.
You can't really tell in these portraits, but looking down on them from above, the first stripe looks quite well developed. Now that you know to look for it, you can sort of make your eyes see the head band can't you.